Cleanroom at IGS

  • Cleanroom class 10 (US FED STD 209E)
Cleanroom with Coating Equipment

Coating Equipment

  • B 30, Fa. HVD (Vaporisation)
  • LA 320S,  ARDENNE-Anlagentechnik GmbH (Magnetron-Sputtering)
  • HZS 03,  ZFT Mikroelektronik
Spincoater Delta 10TT (SÜSS MicroTec)

Spincoater Delta 10TT